Introduction to Microsystem Design

This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not req...

Πλήρης περιγραφή

Λεπτομέρειες βιβλιογραφικής εγγραφής
Κύριος συγγραφέας: Schomburg, Werner Karl (Συγγραφέας)
Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
Γλώσσα:English
Έκδοση: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2015.
Έκδοση:2nd ed. 2015.
Σειρά:RWTHedition,
Θέματα:
Διαθέσιμο Online:Full Text via HEAL-Link
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100 1 |a Schomburg, Werner Karl.  |e author. 
245 1 0 |a Introduction to Microsystem Design  |h [electronic resource] /  |c by Werner Karl Schomburg. 
250 |a 2nd ed. 2015. 
264 1 |a Berlin, Heidelberg :  |b Springer Berlin Heidelberg :  |b Imprint: Springer,  |c 2015. 
300 |a XXIV, 374 p. 380 illus., 332 illus. in color.  |b online resource. 
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490 1 |a RWTHedition,  |x 1865-0899 
505 0 |a Scaling Laws -- Elastic deformations -- Thin Films -- Conductor Paths -- Electrical Measurements -- Membranes -- Strain gauges on membranes -- Beams -- Vibrations -- Capillaries -- Capacitive forces -- Piezoelectric effect -- Thermal actuators -- Micro optics -- Diffusion -- Micro valves -- Micro pumps -- Micro dosing -- Analogies of physical domains -- Mechanical devices for electronics. 
520 |a This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not require previous knowledge of fabrication processes. This second edition of the volume is a thoroughly revised and extended update. The target audience primarily comprises experts in the field of micro systems and the book is also suitable for graduate engineering students. For quick reference, equations are presented in tables that can be found in an index at the end of the book.  . 
650 0 |a Engineering. 
650 0 |a Nanotechnology. 
650 0 |a Electronics. 
650 0 |a Microelectronics. 
650 0 |a Electronic circuits. 
650 1 4 |a Engineering. 
650 2 4 |a Electronics and Microelectronics, Instrumentation. 
650 2 4 |a Circuits and Systems. 
650 2 4 |a Nanotechnology and Microengineering. 
710 2 |a SpringerLink (Online service) 
773 0 |t Springer eBooks 
776 0 8 |i Printed edition:  |z 9783662470220 
830 0 |a RWTHedition,  |x 1865-0899 
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912 |a ZDB-2-ENG 
950 |a Engineering (Springer-11647)