Introduction to Microsystem Design

• Κύριος συγγραφέας: Schomburg, Werner Karl (Συγγραφέας)
• Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
• Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
• Γλώσσα: English
• Έκδοση: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2015.
• Έκδοση: 2nd ed. 2015.
• Σειρά: RWTHedition,
• Θέματα: Engineering.; Nanotechnology.; Electronics.; Microelectronics.; Electronic circuits.; Electronics and Microelectronics, Instrumentation.; Circuits and Systems.; Nanotechnology and Microengineering.

This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not req...

Πίνακας περιεχομένων:

• Scaling Laws
• Elastic deformations
• Thin Films
• Conductor Paths
• Electrical Measurements
• Membranes
• Strain gauges on membranes
• Beams
• Vibrations
• Capillaries
• Capacitive forces
• Piezoelectric effect
• Thermal actuators
• Micro optics
• Diffusion
• Micro valves
• Micro pumps
• Micro dosing
• Analogies of physical domains
• Mechanical devices for electronics.