Nanofabrication Techniques and Principles /

• Corporate Author: SpringerLink (Online service)
• Other Authors: Stepanova, Maria (Editor), Dew, Steven (Editor)
• Format: Electronic eBook
• Language: English
• Published: Vienna : Springer Vienna, 2012.
• Subjects: Materials science.; Nanochemistry.; Lasers.; Photonics.; Nanotechnology.; Materials Science.; Nanotechnology and Microengineering.; Laser Technology, Photonics.

Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with n...