APA (7th ed.) Citation

Samukawa, S. (2014). Feature Profile Evolution in Plasma Processing Using On-wafer Monitoring System. Springer Japan : Imprint: Springer.

Chicago Style (17th ed.) Citation

Samukawa, Seiji. Feature Profile Evolution in Plasma Processing Using On-wafer Monitoring System. Tokyo: Springer Japan : Imprint: Springer, 2014.

MLA (8th ed.) Citation

Samukawa, Seiji. Feature Profile Evolution in Plasma Processing Using On-wafer Monitoring System. Springer Japan : Imprint: Springer, 2014.

Warning: These citations may not always be 100% accurate.