Feature Profile Evolution in Plasma Processing Using On-wafer Monitoring System
This book provides for the first time a good understanding of the etching profile technologies that do not disturb the plasma. Three types of sensors are introduced: on-wafer UV sensors, on-wafer charge-up sensors and on-wafer sheath-shape sensors in the plasma processing and prediction system of re...
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| Format: | Electronic eBook |
| Language: | English |
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Tokyo :
Springer Japan : Imprint: Springer,
2014.
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| Series: | SpringerBriefs in Applied Sciences and Technology,
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| Online Access: | Full Text via HEAL-Link |
