Mechanics and Physics of Precise Vacuum Mechanisms

• Main Authors: Deulin, E. A. (Author), Mikhailov, V. P. (Author), Panfilov, Yu V. (Author), Nevshupa, R. A. (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Dordrecht : Springer Netherlands, 2010.
• Series: Fluid Mechanics and Its Applications, 91
• Subjects: Engineering.; Vibration.; Dynamical systems.; Dynamics.; Engineering design.; Tribology.; Corrosion and anti-corrosives.; Coatings.; Materials > Surfaces.; Thin films.; Engineering Design.; Engineering, general.; Tribology, Corrosion and Coatings.; Surfaces and Interfaces, Thin Films.; Vibration, Dynamical Systems, Control.

In this book the Russian expertise in the field of the design of precise vacuum mechanics is summarized. A wide range of physical applications of mechanism design in electronic, optical-electronic, chemical, and aerospace industries is presented in a comprehensible way. Topics treated include the me...

Table of Contents:

• Using Precise Mechanisms in Modern Vacuum Technological Equipment
• Typical Vacuum Mechanisms
• Friction in Vacuum
• Matrix Method of the Design of New Mechanisms Structure
• Precision of Vacuum Mechanisms
• Vacuum Mechanisms of Nanoscale Precision
• Ultrahigh Vacuum Rotary-Motion Feedthroughs
• Ultrahigh Vacuum Non-Coaxial Linear-Motion Feedthroughs
• Vacuum Frictionless Mechanisms Based on the Principle of Controlled Elastic Deformation
• Flow of Microparticles Originating from Mechanisms in Vacuum.