Microsystems Dynamics
In recent years microelectromechanical systems (MEMS) have emerged as a new technology with enormous application potential. MEMS manufacturing techniques are essentially the same as those used in the semiconductor industry, therefore they can be produced in large quantities at low cost. The added be...
| Κύριοι συγγραφείς: | , |
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| Συγγραφή απο Οργανισμό/Αρχή: | |
| Μορφή: | Ηλεκτρονική πηγή Ηλ. βιβλίο |
| Γλώσσα: | English |
| Έκδοση: |
Dordrecht :
Springer Netherlands : Imprint: Springer,
2011.
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| Σειρά: | Intelligent Systems, Control and Automation: Science and Engineering,
44 |
| Θέματα: | |
| Διαθέσιμο Online: | Full Text via HEAL-Link |
