Microsystems Dynamics

• Main Authors: Ostasevicius, Vytautas (Author), Dauksevicius, Rolanas (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Dordrecht : Springer Netherlands : Imprint: Springer, 2011.
• Series: Intelligent Systems, Control and Automation: Science and Engineering, 44
• Subjects: Engineering.; Computational intelligence.; Continuum mechanics.; Structural mechanics.; Engineering design.; Nanotechnology.; Nanotechnology and Microengineering.; Engineering Design.; Structural Mechanics.; Computational Intelligence.; Continuum Mechanics and Mechanics of Materials.

In recent years microelectromechanical systems (MEMS) have emerged as a new technology with enormous application potential. MEMS manufacturing techniques are essentially the same as those used in the semiconductor industry, therefore they can be produced in large quantities at low cost. The added be...