Non-Classical Crystallization of Thin Films and Nanostructures in CVD and PVD Processes

• Main Author: Hwang, Nong Moon (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Dordrecht : Springer Netherlands : Imprint: Springer, 2016.
• Series: Springer Series in Surface Sciences, 60
• Subjects: Physics.; Nanoscale science.; Nanoscience.; Nanostructures.; Semiconductors.; Surfaces (Physics).; Interfaces (Physical sciences).; Thin films.; Nanotechnology.; Materials > Surfaces.; Surface and Interface Science, Thin Films.; Surfaces and Interfaces, Thin Films.; Nanoscale Science and Technology.

This book provides a comprehensive introduction to a recently-developed approach to the growth mechanism of thin films and nanostructures via chemical vapour deposition (CVD). Starting from the underlying principles of the low pressure synthesis of diamond films, it is shown that diamond growth occu...

Table of Contents:

• 1 Non-Classical Crystallization
• 2 Thermodynamics of Physical and Chemical Vapour Deposition
• 3 Nucleation
• 4 Growth
• 5 Diamond Synthesis at Low Pressure
• 6 Growth Mechanism of CVD Diamond
• 7 Growth Mechanism of CVD Silicon
• 8 Other Works Related to Non-Classical Crystallization of Thin Films and Nanostructures
• 9 Experimental Confirmation of Charged Nanoparticles during Atmospheric CVD Using Differential Mobility Analyser
• 10 Experimental Confirmation of Charged Nanoparticles at Low Pressure
• 11 Deposition Behavior of Charged Nanoparticles
• 12 Bias Effect on Deposition Behaviour of Charged Nanoparticles
• 13 Charge-Enhanced Kinetics
• 14 Implications and Applications. .