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02911nam a2200529 4500 |
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978-981-10-6165-3 |
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DE-He213 |
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20191026081215.0 |
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170908s2018 si | s |||| 0|eng d |
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|a 9789811061653
|9 978-981-10-6165-3
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|a 10.1007/978-981-10-6165-3
|2 doi
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|a Cheng, Jie.
|e author.
|4 aut
|4 http://id.loc.gov/vocabulary/relators/aut
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|a Research on Chemical Mechanical Polishing Mechanism of Novel Diffusion Barrier Ru for Cu Interconnect
|h [electronic resource] /
|c by Jie Cheng.
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|a 1st ed. 2018.
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|a Singapore :
|b Springer Singapore :
|b Imprint: Springer,
|c 2018.
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|a XVIII, 137 p. 103 illus.
|b online resource.
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|a text
|b txt
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|a online resource
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|a text file
|b PDF
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|a Springer Theses, Recognizing Outstanding Ph.D. Research,
|x 2190-5053
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|a This thesis addresses selected unsolved problems in the chemical mechanical polishing process (CMP) for integrated circuits using ruthenium (Ru) as a novel barrier layer material. Pursuing a systematic approach to resolve the remaining critical issues in the CMP, it first investigates the tribocorrosion properties and the material removal mechanisms of copper (Cu) and Ru in KIO4-based slurry. The thesis subsequently studies Cu/Ru galvanic corrosion from a new micro and in-situ perspective, and on this basis, seeks ways to mitigate corrosion using different slurry additives. The findings presented here constitute a significant advance in fundamental and technical investigations into the CMP, while also laying the groundwork for future research.
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|a Tribology.
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|a Corrosion and anti-corrosives.
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|a Coatings.
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|a Electronics.
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|a Microelectronics.
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|a Manufacturing, Machines, Tools, Processes.
|0 http://scigraph.springernature.com/things/product-market-codes/T22050
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|a Tribology, Corrosion and Coatings.
|0 http://scigraph.springernature.com/things/product-market-codes/Z15000
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|a Electronics and Microelectronics, Instrumentation.
|0 http://scigraph.springernature.com/things/product-market-codes/T24027
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|a SpringerLink (Online service)
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|t Springer eBooks
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|i Printed edition:
|z 9789811061646
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|i Printed edition:
|z 9789811061660
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|i Printed edition:
|z 9789811355851
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|a Springer Theses, Recognizing Outstanding Ph.D. Research,
|x 2190-5053
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|u https://doi.org/10.1007/978-981-10-6165-3
|z Full Text via HEAL-Link
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|a ZDB-2-ENG
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|a Engineering (Springer-11647)
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