Micro and Nano Fabrication Technology

• Corporate Author: SpringerLink (Online service)
• Other Authors: Yan, Jiwang (Editor, http://id.loc.gov/vocabulary/relators/edt)
• Format: Electronic eBook
• Language: English
• Published: Singapore : Springer Singapore : Imprint: Springer, 2018.
• Edition: 1st ed. 2018.
• Series: Micro/Nano Technologies,
• Subjects: Nanotechnology.; Medicine.; Biomedical engineering.; Nanotechnology and Microengineering.; Medicine/Public Health, general.; Biomedical Engineering and Bioengineering.

This volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary technologies include mechanical, electrical, optical, physical, and chemical methods, as well as hybrid processes, covering subtractive and ad...