Micro and Nano Fabrication Technology

• Corporate Author: SpringerLink (Online service)
• Other Authors: Yan, Jiwang (Editor, http://id.loc.gov/vocabulary/relators/edt)
• Format: Electronic eBook
• Language: English
• Published: Singapore : Springer Singapore : Imprint: Springer, 2018.
• Edition: 1st ed. 2018.
• Series: Micro/Nano Technologies,
• Subjects: Nanotechnology.; Medicine.; Biomedical engineering.; Nanotechnology and Microengineering.; Medicine/Public Health, general.; Biomedical Engineering and Bioengineering.

This volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary technologies include mechanical, electrical, optical, physical, and chemical methods, as well as hybrid processes, covering subtractive and ad...

Table of Contents:

• Part 1 Cutting technology
• Chapter 1 Micro chiseling of retroreflective arrays
• Chapter 2 Micro milling for functional surface
• Chapter 3 Micro cylindrical turning of calcium fluoride
• Chapter 4 Nanogrooving by using multi-tip diamond tools
• Chapter 5 Elliptical vibration cutting for difficult-to-cut materials
• Chapter 6 Micro machining of roller mould for roll-to-roll manufacturing
• Chapter 7 Tool servo-driven diamond turning for structured surface
• Part 2 Abrasive/tip-based machining technology
• Chapter 8 Micro/nano texturing by ultrasonic assisted grinding
• Chapter 9 Precision grinding for functional micro-structured surface
• Chapter 10 Micro fluid jet polishing
• Chapter 11 Bonnet polishing of microstructured surface
• Chapter 12 Soft-brittle semiconductors polishing with environment-friendly slurries
• Chapter 13 Three-dimensional fabrication of micro/nanostructure using scanning probe lithography
• Part 3 High-energy beam machining technology
• Chapter 14 Femtosecond laser direct writing
• Chapter 15 Laser patterning of metallic glass
• Chapter 16 Ion beam machining
• Chapter 17 Electron beam machining
• Chapter 18 Microfabrication by laser lithography combined with ion etching
• Part 4 Molding/forming/self-organization technology
• Chapter 19 Replication of Micro/Nanostructures
• Chapter 20 Precision Molding of Microstructures on Chalcogenide Glass for Infrared Optics
• Chapter 21 Press molding of hybrid Fresnel lenses for infrared applications
• Chapter 22 Microspring fabrication by anisotropic gelation
• Chapter 23 Fabrication of Metallic Nanodot Arrays
• Chapter 24 Surface micro/nano-structuring using Self-assembly of fine particles
• Part 5 Physical/chemical machining technology
• Chapter 25 Micro electrical discharge machining of hard brittle materials
• Chapter 26 Micro Electrochemical Machining
• Chapter 27 Catalytic AFM-based nanofabrication
• Chapter 28 3D Microfabrication using photocatalytic reaction
• Chapter 29 Silicon etching for multiple-height microstructures
• Chapter 30 Local wettability modification and its micro-fluidic system application.