Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors

• Κύριοι συγγραφείς: Dinh, Toan (Συγγραφέας, http://id.loc.gov/vocabulary/relators/aut), Nguyen, Nam-Trung (http://id.loc.gov/vocabulary/relators/aut), Dao, Dzung Viet (http://id.loc.gov/vocabulary/relators/aut)
• Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
• Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
• Γλώσσα: English
• Έκδοση: Singapore : Springer Singapore : Imprint: Springer, 2018.
• Έκδοση: 1st ed. 2018.
• Σειρά: SpringerBriefs in Applied Sciences and Technology,
• Θέματα: Nanotechnology.; Solid state physics.; Nanotechnology and Microengineering.; Solid State Physics.

This book presents the fundamentals of the thermoelectrical effect in silicon carbide (SiC), including the thermoresistive, thermoelectric, thermocapacitive and thermoelectronic effects. It summarizes the growth of SiC, its properties and fabrication processes for SiC devices and introduces the ther...