Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors

• Κύριοι συγγραφείς: Dinh, Toan (Συγγραφέας, http://id.loc.gov/vocabulary/relators/aut), Nguyen, Nam-Trung (http://id.loc.gov/vocabulary/relators/aut), Dao, Dzung Viet (http://id.loc.gov/vocabulary/relators/aut)
• Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
• Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
• Γλώσσα: English
• Έκδοση: Singapore : Springer Singapore : Imprint: Springer, 2018.
• Έκδοση: 1st ed. 2018.
• Σειρά: SpringerBriefs in Applied Sciences and Technology,
• Θέματα: Nanotechnology.; Solid state physics.; Nanotechnology and Microengineering.; Solid State Physics.

This book presents the fundamentals of the thermoelectrical effect in silicon carbide (SiC), including the thermoresistive, thermoelectric, thermocapacitive and thermoelectronic effects. It summarizes the growth of SiC, its properties and fabrication processes for SiC devices and introduces the ther...

Πίνακας περιεχομένων:

• Introduction to SiC and Thermoelectrical Properties
• Fundamentals of Thermoelectrical Effect in SiC
• Desirable Features for High Temperature SiC Sensors
• Fabrication of SiC MEMS Sensors
• Impact of Design and Process on Performance of SiC Thermal Devices
• Applications of Thermoelectrical Effect in SiC
• Future prospects of SiC Thermoelectrical Sensing Devices.