Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors

• Main Authors: Dinh, Toan (Author, http://id.loc.gov/vocabulary/relators/aut), Nguyen, Nam-Trung (http://id.loc.gov/vocabulary/relators/aut), Dao, Dzung Viet (http://id.loc.gov/vocabulary/relators/aut)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Singapore : Springer Singapore : Imprint: Springer, 2018.
• Edition: 1st ed. 2018.
• Series: SpringerBriefs in Applied Sciences and Technology,
• Subjects: Nanotechnology.; Solid state physics.; Nanotechnology and Microengineering.; Solid State Physics.

This book presents the fundamentals of the thermoelectrical effect in silicon carbide (SiC), including the thermoresistive, thermoelectric, thermocapacitive and thermoelectronic effects. It summarizes the growth of SiC, its properties and fabrication processes for SiC devices and introduces the ther...