Film flow over solid substrates : the effect of fluid rheology and substrate geometry and the prediction of formation of gas inclusions

• Κύριος συγγραφέας: Παυλίδης, Μιχαήλ
• Άλλοι συγγραφείς: Τσαμόπουλος, Ιωάννης
• Μορφή: Thesis
• Γλώσσα: English
• Έκδοση: 2010
• Θέματα: Film flow; Viscoelastic fluid; Surface coating; Spin coating; Analytical solutions; Flow over topography; Elliptic mesh generation; Static contact lines; Ροή υμένα; Ιξωδοελαστικό ρευστό; Επιφανειακή επικάλυψη; Επικάλυψη εκ περιστροφής; Αναλυτικές λύσεις; Ροή σε τοπογραφία; Ελλειπτική δημιουργία πλέγματος; Στατικές γραμμές επαφής; 532.053 3

Surface coating is widely used in microelectronic industry to produce thin films over surfaces with uneven topography. Such processes are used in fabricating integrated circuits, storage devices, such as magnetic disks, memory devices and optical disks as well as for manufacturing adhesives, magnetic tapes, magazines which can produce thicker films over patterns of similar depth and width at higher speeds. Other applications of film flow over uneven surfaces come from specific designs of surfaces of heat-exchangers and the surfaces of various structured packings used to improve heat and mass transfer operations. The one-dimensional, gravity-driven film-flow of a linear or exponential PTT liquid, flowing either on the outer or on the inner surface of a vertical cylinder or over a planar wall is analyzed. Numerical solution of the governing equations is generally possible. Analytical solutions are derived only for: (i) linear PTT model in cylindrical and planar geometries in the absence of solvent and the affinity parameter set at zero; (ii) linear or exponential PTT model in a planar geometry in the absence of solvent and the affinity parameter the affinity parameter obtains nonzero values; (iii) exponential PTT model in planar geometry in the absence of solvent and the affinity parameter set at zero. Then, the two-dimensional, steady flow of a viscoelastic film over a periodic topography under the action of a body force is studied. It is examined the interplay of elastic, viscous, inertia and capillary forces on the film thickness and planarization efficiency over steep topographical changes of the substrate. The code is validated by verifying that in isolated topographies the periodicity conditions result in fully developed viscoelastic film flow at the inflow/outflow boundaries and that its predictions for Newtonian fluids over 2D topography under creeping flow conditions coincide with those of previous works. Finally, the steady film-flow of a Newtonian fluid has been studied over a trench examining the various types of inclusions that can be formed. It can be distinguished three possible flow configurations when (a) the triple contact points are ‘pinned’ at the lips of the cavity, (b) the triple contact points are at the left side and the bottom of the cavity so that the cavity is not filled with liquid only around its left concave corner and (c) the two triple contact points are at the two sides of the cavity so that its bottom remains empty.