Film flow over solid substrates : the effect of fluid rheology and substrate geometry and the prediction of formation of gas inclusions

Surface coating is widely used in microelectronic industry to produce thin films over surfaces with uneven topography. Such processes are used in fabricating integrated circuits, storage devices, such as magnetic disks, memory devices and optical disks as well as for manufacturing adhesives, magneti...

Πλήρης περιγραφή

Λεπτομέρειες βιβλιογραφικής εγγραφής
Κύριος συγγραφέας: Παυλίδης, Μιχαήλ
Άλλοι συγγραφείς: Τσαμόπουλος, Ιωάννης
Μορφή: Thesis
Γλώσσα:English
Έκδοση: 2010
Θέματα:
Διαθέσιμο Online:http://nemertes.lis.upatras.gr/jspui/handle/10889/2836