Film flow over solid substrates : the effect of fluid rheology and substrate geometry and the prediction of formation of gas inclusions

• Main Author: Παυλίδης, Μιχαήλ
• Other Authors: Τσαμόπουλος, Ιωάννης
• Format: Thesis
• Language: English
• Published: 2010
• Subjects: Film flow; Viscoelastic fluid; Surface coating; Spin coating; Analytical solutions; Flow over topography; Elliptic mesh generation; Static contact lines; Ροή υμένα; Ιξωδοελαστικό ρευστό; Επιφανειακή επικάλυψη; Επικάλυψη εκ περιστροφής; Αναλυτικές λύσεις; Ροή σε τοπογραφία; Ελλειπτική δημιουργία πλέγματος; Στατικές γραμμές επαφής; 532.053 3

Surface coating is widely used in microelectronic industry to produce thin films over surfaces with uneven topography. Such processes are used in fabricating integrated circuits, storage devices, such as magnetic disks, memory devices and optical disks as well as for manufacturing adhesives, magneti...