Film flow over solid substrates : the effect of fluid rheology and substrate geometry and the prediction of formation of gas inclusions
Surface coating is widely used in microelectronic industry to produce thin films over surfaces with uneven topography. Such processes are used in fabricating integrated circuits, storage devices, such as magnetic disks, memory devices and optical disks as well as for manufacturing adhesives, magneti...
| Κύριος συγγραφέας: | |
|---|---|
| Άλλοι συγγραφείς: | |
| Μορφή: | Thesis |
| Γλώσσα: | English |
| Έκδοση: |
2010
|
| Θέματα: | |
| Διαθέσιμο Online: | http://nemertes.lis.upatras.gr/jspui/handle/10889/2836 |
