Fault detection and diagnosis : application in microelectromechanical systems

• Κύριος συγγραφέας: Ρέππα, Βασιλική
• Άλλοι συγγραφείς: Τζες, Αντώνιος
• Μορφή: Thesis
• Γλώσσα: English
• Έκδοση: 2010
• Θέματα: Fault detection; Fault isolation; Fault identification; Set membership identification; Orthotopes; Ellipsoids; Microelectromechanical systems; Electrostatic microactuator; Torsional resonance atomic force microscope; Ανίχνευση σφαλμάτων; Απομόνωση σφαλμάτων; Αναγνώριση σφαλμάτων; Αναγνώριση συνόλου συμμετοχής; Ορθότοπα; Ελλειψοειδή; Μικροηλεκτρομηχανικά συστήματα; Ηλεκτροστατικός μικροεπενεργητής; Ατομικό μικροσκόπιο συντονισμού στρέψης; 620.004 4

This thesis presents the development of a fault detection and diagnosis (FDD) procedure capable of capturing, isolating and identifying multiple abrupt parametric faults. The proposed method relies on parameter estimation deployed in a set membership framework. This approach presupposes the utilization of a linearly parametrizable model and the a priori knowledge of bounded noise errors and parameter perturbations. Under these assumptions, a data-hyperspace is generated at every time instant. The goal of set membership identification (SMI) is the determination of the parametric set, formed as an orthotope or ellipsoid, within which the nominal parameter vector resides and intersects with the data-hyperspace. The fault detection mechanism is activated when the normal operation of the SMI procedure is interrupted due to an empty intersection of the data-hyperspace and the estimated parametric set. At the detection instant, a resetting procedure is performed in order to compute the parameter set and the data-hyperspace that contain the varied nominal parameter vector, allowing the SMI algorithm to continue its operation. During the fault isolation, consistency tests are executed, relying on the projections of the worst case parametric sets and the ones arisen from the normal operation of SMI. A faulty component is indicated when these projections do not intersect, while the distance of their centers is used for fault identification. In case of the ellipsoidal SMI-based FDD and under the assumption of a time invariant parameter vector, a new fault detection criterion is defined based on the intersection of support orthotopes of ellipsoids. A more accurate estimation of the time instant of fault occurrence is proposed based on the application of a backward-in-time procedure starting from the fault detection instant, while the conditions under which a fault will never be detected by the orthotopic and ellipsoidal SMI based FDD are provided. This dissertation explores the efficiency of the proposed FDD methodology for capturing failure modes of two microelectromechanical systems; an electrostatic parallel-plate microactuator and a torsionally resonant atomic force microscope. From an engineering point of view, failure modes appeared in the microcomponents of the microactuator and the TR-AFM are encountered as parameter variations and are captured, isolated and identified by the proposed FDD methodology.