Micro and Nano Engineering

Micro and Nano Engineering

Bibliographic Details
Format: journal
Language:English
Published: Elsevier 2019
Subjects:
nanotechnology
microelectronics
nanolithography
nanometrology
nanofabrication
microdevices
Electronics
TK7800-8360
Technology (General)
T1-995
Online Access:https://doaj.org/toc/2590-0072
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spelling oai:doaj.org-journal:f19756b070754acbbc310505b6b92ab72023-05-02T08:53:15ZMicro and Nano Engineering2590-0072https://doaj.org/toc/2590-0072ENCC BYCC BY-NC-NDElsevierhttps://www.journals.elsevier.com/micro-and-nano-engineeringhttps://www.elsevier.com/journals/micro-and-nano-engineering/2590-0072/guide-for-authorshttps://www.elsevier.com/authors/open-access/choice#waivershttps://www.elsevier.com/journals/micro-and-nano-engineering/2590-0072/open-access-journal2019-05-15T11:01:32ZjournalnanotechnologymicroelectronicsnanolithographynanometrologynanofabricationmicrodevicesElectronicsTK7800-8360Technology (General)T1-995
institution DOAJ
collection DSpace
language English
topic nanotechnology
microelectronics
nanolithography
nanometrology
nanofabrication
microdevices
Electronics
TK7800-8360
Technology (General)
T1-995
spellingShingle nanotechnology
microelectronics
nanolithography
nanometrology
nanofabrication
microdevices
Electronics
TK7800-8360
Technology (General)
T1-995
Micro and Nano Engineering
format journal
title Micro and Nano Engineering
title_short Micro and Nano Engineering
title_full Micro and Nano Engineering
title_fullStr Micro and Nano Engineering
title_full_unstemmed Micro and Nano Engineering
title_sort micro and nano engineering
publisher Elsevier
publishDate 2019
url https://doaj.org/toc/2590-0072
_version_ 1801185058159067136

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