Micro and Nano Engineering
| Μορφή: | journal |
|---|---|
| Γλώσσα: | English |
| Έκδοση: |
Elsevier
2019
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| Θέματα: | |
| Διαθέσιμο Online: | https://doaj.org/toc/2590-0072 |
| id |
oai:doaj.org-journal:f19756b070754acbbc310505b6b92ab7 |
|---|---|
| record_format |
dspace |
| spelling |
oai:doaj.org-journal:f19756b070754acbbc310505b6b92ab72023-05-02T08:53:15ZMicro and Nano Engineering2590-0072https://doaj.org/toc/2590-0072ENCC BYCC BY-NC-NDElsevierhttps://www.journals.elsevier.com/micro-and-nano-engineeringhttps://www.elsevier.com/journals/micro-and-nano-engineering/2590-0072/guide-for-authorshttps://www.elsevier.com/authors/open-access/choice#waivershttps://www.elsevier.com/journals/micro-and-nano-engineering/2590-0072/open-access-journal2019-05-15T11:01:32ZjournalnanotechnologymicroelectronicsnanolithographynanometrologynanofabricationmicrodevicesElectronicsTK7800-8360Technology (General)T1-995 |
| institution |
DOAJ |
| collection |
DSpace |
| language |
English |
| topic |
nanotechnology microelectronics nanolithography nanometrology nanofabrication microdevices Electronics TK7800-8360 Technology (General) T1-995 |
| spellingShingle |
nanotechnology microelectronics nanolithography nanometrology nanofabrication microdevices Electronics TK7800-8360 Technology (General) T1-995 Micro and Nano Engineering |
| format |
journal |
| title |
Micro and Nano Engineering |
| title_short |
Micro and Nano Engineering |
| title_full |
Micro and Nano Engineering |
| title_fullStr |
Micro and Nano Engineering |
| title_full_unstemmed |
Micro and Nano Engineering |
| title_sort |
micro and nano engineering |
| publisher |
Elsevier |
| publishDate |
2019 |
| url |
https://doaj.org/toc/2590-0072 |
| _version_ |
1801185058159067136 |
