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oapen-20.500.12657-323572021-11-12T16:12:50Z Plasma Science and Technology - Progress in Physical States and Chemical Reactions Mieno, Tetsu plasma science technology bic Book Industry Communication::P Mathematics & science::PD Science: general issues In the early twentieth century, Dr. Irving Langmuir actively studied plasma discharge and surface science. Since then, great progress has been made in the development of applications of discharges and plasmas such as discharge lamps, electric tubes, and arc welding. In relation to studies on space physics and controlled nuclear fusion, plasma physics has greatly advanced. Plasma chemistry has also progressed along with its applications in LSI fabrication technology, the chemical vapor deposition of functional films, and the production of nanomaterials. In the twenty-first century, the further development of applications of plasma physics and plasma chemistry is certainly expected. In this book, 18 chapters on the recent progress in plasma science and technology have been written by active specialists worldwide. 2016-12-31 23:55:55 2019-10-04 14:18:25 2020-04-01T14:07:10Z 2020-04-01T14:07:10Z 2016 book 612530 OCN: 1030823023 9789535122807 http://library.oapen.org/handle/20.500.12657/32357 eng InTechOpen 10.5772/60692 10.5772/60692 09f6769d-48ed-467d-b150-4cf2680656a1 1d272927-04a1-49e8-b402-17d763867fef 9789535122807 574 open access
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In the early twentieth century, Dr. Irving Langmuir actively studied plasma discharge and surface science. Since then, great progress has been made in the development of applications of discharges and plasmas such as discharge lamps, electric tubes, and arc welding. In relation to studies on space physics and controlled nuclear fusion, plasma physics has greatly advanced. Plasma chemistry has also progressed along with its applications in LSI fabrication technology, the chemical vapor deposition of functional films, and the production of nanomaterials. In the twenty-first century, the further development of applications of plasma physics and plasma chemistry is certainly expected. In this book, 18 chapters on the recent progress in plasma science and technology have been written by active specialists worldwide.
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