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oapen-20.500.12657-51931
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oapen-20.500.12657-519312021-12-14T02:45:27Z Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry Taudt, Christopher surface metrology profilometry interferometry low-coherence interferometry semiconductor manufacturing optical metrology Open Access bic Book Industry Communication::P Mathematics & science::PH Physics::PHJ Optical physics bic Book Industry Communication::P Mathematics & science::PD Science: general issues::PDD Scientific standards::PDDM Mensuration & systems of measurement This Open Access book discusses an extension to low-coherence interferometry by dispersion-encoding. The approach is theoretically designed and implemented for applications such as surface profilometry, polymeric cross-linking estimation and the determination of thin-film layer thicknesses. During a characterization, it was shown that an axial measurement range of 79.91 µm with an axial resolution of 0.1 nm is achievable. Simultaneously, profiles of up to 1.5 mm in length were obtained in a scan-free manner. This marked a significant improvement in relation to the state-of-the-art in terms of dynamic range. Also, the axial and lateral measurement range were decoupled partially while functional parameters such as surface roughness were estimated. The characterization of the degree of polymeric cross-linking was performed as a function of the refractive index. It was acquired in a spatially-resolved manner with a resolution of 3.36 x 10-5. This was achieved by the development of a novel mathematical analysis approach. 2021-12-13T18:55:18Z 2021-12-13T18:55:18Z 2022 book ONIX_20211213_9783658359263_14 9783658359263 https://library.oapen.org/handle/20.500.12657/51931 eng application/pdf n/a 978-3-658-35926-3.pdf https://link.springer.com/978-3-658-35926-3 Springer Nature Springer Vieweg 10.1007/978-3-658-35926-3 10.1007/978-3-658-35926-3 6c6992af-b843-4f46-859c-f6e9998e40d5 920b9b3b-c6db-4103-995b-d5f9c918d5d2 29964b97-7084-4a33-8a04-1d460fcd4895 9783658359263 Springer Vieweg 163 Bern [grantnumber unknown] [grantnumber unknown] open access
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OAPEN
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DSpace
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| language |
English
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| description |
This Open Access book discusses an extension to low-coherence interferometry by dispersion-encoding. The approach is theoretically designed and implemented for applications such as surface profilometry, polymeric cross-linking estimation and the determination of thin-film layer thicknesses. During a characterization, it was shown that an axial measurement range of 79.91 µm with an axial resolution of 0.1 nm is achievable. Simultaneously, profiles of up to 1.5 mm in length were obtained in a scan-free manner. This marked a significant improvement in relation to the state-of-the-art in terms of dynamic range. Also, the axial and lateral measurement range were decoupled partially while functional parameters such as surface roughness were estimated. The characterization of the degree of polymeric cross-linking was performed as a function of the refractive index. It was acquired in a spatially-resolved manner with a resolution of 3.36 x 10-5. This was achieved by the development of a novel mathematical analysis approach.
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| title |
978-3-658-35926-3.pdf
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| spellingShingle |
978-3-658-35926-3.pdf
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| title_short |
978-3-658-35926-3.pdf
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| title_full |
978-3-658-35926-3.pdf
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| title_fullStr |
978-3-658-35926-3.pdf
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| title_full_unstemmed |
978-3-658-35926-3.pdf
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| title_sort |
978-3-658-35926-3.pdf
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| publisher |
Springer Nature
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| publishDate |
2021
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| url |
https://link.springer.com/978-3-658-35926-3
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| _version_ |
1771297552029712384
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