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oapen-20.500.12657-64057
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dspace
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oapen-20.500.12657-640572023-07-25T02:49:38Z Abbildende Ellipsometrie mit Lichtwegumkehrung für die optische Charakterisierung von gekrümmten Oberflächen Negara, Christian Emanuel imaging; retroreflection; curved surface; ellipsometry; bildgebend; Retroreflexion; gekrümmte Oberfläche; Ellipsometrie; metrology; Messtechnik bic Book Industry Communication::U Computing & information technology::UY Computer science::UYA Mathematical theory of computation::UYAM Maths for computer scientists Ellipsometry is a measuring method for surface characterization and thin-film measurement of flat surfaces using polarized light. However, a new measuring principle based on return-path ellipsometry and retroreflection enables the detection of free-form surfaces. This new measurement principle and related questions regarding the measurement function, evaluation algorithms and ambiguities as well as degrees of freedom of the solution set are examined in this work. 2023-07-24T09:04:06Z 2023-07-24T09:04:06Z 2023 book https://library.oapen.org/handle/20.500.12657/64057 ger Schriftenreihe Automatische Sichtprüfung und Bildverarbeitung application/pdf Attribution 4.0 International abbildende-ellipsometrie-mit-lichtwegumkehrung-fur-die-optische-charakterisierung-von-gekrummten-oberflachen.pdf https://doi.org/10.5445/KSP/1000158762 KIT Scientific Publishing 10.5445/KSP/1000158762 10.5445/KSP/1000158762 44e29711-8d53-496b-85cc-3d10c9469be9 6 324 open access
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| institution |
OAPEN
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DSpace
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| language |
German
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| description |
Ellipsometry is a measuring method for surface characterization and thin-film measurement of flat surfaces using polarized light. However, a new measuring principle based on return-path ellipsometry and retroreflection enables the detection of free-form surfaces. This new measurement principle and related questions regarding the measurement function, evaluation algorithms and ambiguities as well as degrees of freedom of the solution set are examined in this work.
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| title |
abbildende-ellipsometrie-mit-lichtwegumkehrung-fur-die-optische-charakterisierung-von-gekrummten-oberflachen.pdf
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| spellingShingle |
abbildende-ellipsometrie-mit-lichtwegumkehrung-fur-die-optische-charakterisierung-von-gekrummten-oberflachen.pdf
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| title_short |
abbildende-ellipsometrie-mit-lichtwegumkehrung-fur-die-optische-charakterisierung-von-gekrummten-oberflachen.pdf
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| title_full |
abbildende-ellipsometrie-mit-lichtwegumkehrung-fur-die-optische-charakterisierung-von-gekrummten-oberflachen.pdf
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| title_fullStr |
abbildende-ellipsometrie-mit-lichtwegumkehrung-fur-die-optische-charakterisierung-von-gekrummten-oberflachen.pdf
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| title_full_unstemmed |
abbildende-ellipsometrie-mit-lichtwegumkehrung-fur-die-optische-charakterisierung-von-gekrummten-oberflachen.pdf
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| title_sort |
abbildende-ellipsometrie-mit-lichtwegumkehrung-fur-die-optische-charakterisierung-von-gekrummten-oberflachen.pdf
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| publisher |
KIT Scientific Publishing
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| publishDate |
2023
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| url |
https://doi.org/10.5445/KSP/1000158762
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| _version_ |
1799945298591612928
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