abbildende-ellipsometrie-mit-lichtwegumkehrung-fur-die-optische-charakterisierung-von-gekrummten-oberflachen.pdf
Ellipsometry is a measuring method for surface characterization and thin-film measurement of flat surfaces using polarized light. However, a new measuring principle based on return-path ellipsometry and retroreflection enables the detection of free-form surfaces. This new measurement principle and r...
| Γλώσσα: | German |
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| Έκδοση: |
KIT Scientific Publishing
2023
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| Διαθέσιμο Online: | https://doi.org/10.5445/KSP/1000158762 |
