abbildende-ellipsometrie-mit-lichtwegumkehrung-fur-die-optische-charakterisierung-von-gekrummten-oberflachen.pdf

• Language: German
• Published: KIT Scientific Publishing 2023

Ellipsometry is a measuring method for surface characterization and thin-film measurement of flat surfaces using polarized light. However, a new measuring principle based on return-path ellipsometry and retroreflection enables the detection of free-form surfaces. This new measurement principle and r...