Atomic layer deposition of nanostructured materials /

Atomic layer deposition of nanostructured materials /

Bibliographic Details
Corporate Author: Wiley InterScience (Online service)
Other Authors: Pinna, Nicola, Knez, Mato
Format: eBook
Language:English
Published: Weinheim : Wiley-VCH ; 2011.
Subjects:
Chemical vapor deposition.
Nanostructured materials.
TECHNOLOGY & ENGINEERING > Mechanical.
Electronic books.
Online Access:Full Text via HEAL-Link
Description
Physical Description:1 online resource (1 volume)
Bibliography:Includes bibliographical references and index.
ISBN:9783527639915
3527639918
9783527639939
3527639934
9783527639922
3527639926
DOI:10.1002/9783527639915

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