Atomic layer deposition of nanostructured materials /

Atomic layer deposition of nanostructured materials /

Bibliographic Details
Corporate Author:	Wiley InterScience (Online service)
Other Authors:	Pinna, Nicola, Knez, Mato
Format:	eBook
Language:	English
Published:	Weinheim : Wiley-VCH ; 2011.
Subjects:	Chemical vapor deposition. Nanostructured materials. TECHNOLOGY & ENGINEERING > Mechanical. Electronic books.
Online Access:	Full Text via HEAL-Link

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