Atomic layer deposition of nanostructured materials /

• Συγγραφή απο Οργανισμό/Αρχή: Wiley InterScience (Online service)
• Άλλοι συγγραφείς: Pinna, Nicola, Knez, Mato
• Μορφή: Ηλ. βιβλίο
• Γλώσσα: English
• Έκδοση: Weinheim : Wiley-VCH ; 2011.
• Θέματα: Chemical vapor deposition.; Nanostructured materials.; TECHNOLOGY & ENGINEERING > Mechanical.; Electronic books.

Πίνακας περιεχομένων:

• Front Matter
• Introduction to ALD. Theoretical Modeling of ALD Processes / Charles B Musgrave
• Step Coverage in ALD / Sovan Kumar Panda, Hyunjung Shin
• Precursors for ALD Processes / Matti Putkonen
• Sol₆Gel Chemistry and Atomic Layer Deposition / Guylhaine Clavel, Catherine Marichy, Nicola Pinna
• Molecular Layer Deposition of Hybrid Organic₆Inorganic Films / Steven M George, Byunghoon Yoon, Robert A Hall, Aziz I Abdulagatov, Zachary M Gibbs, Younghee Lee, Dragos Seghete, Byoung H Lee
• Low-Temperature Atomic Layer Deposition / Jens Meyer, Thomas Riedl
• Plasma Atomic Layer Deposition / Erwin Kessels, Harald Profijt, Stephen Potts, Richard van de Sanden
• Nanostructures by ALD. Atomic Layer Deposition for Microelectronic Applications / Cheol Seong Hwang
• Nanopatterning by Area-Selective Atomic Layer Deposition / Han-Bo-Ram Lee, Stacey F Bent
• Coatings on High Aspect Ratio Structures / Jeffrey W Elam
• Coatings of Nanoparticles and Nanowires / Hong Jin Fan, Kornelius Nielsch
• Atomic Layer Deposition on Soft Materials / Gregory N Parsons
• Application of ALD to Biomaterials and Biocompatible Coatings / Mato Knez
• Coating of Carbon Nanotubes / Catherine Marichy, Andrea Pucci, Marc-Georg Willinger, Nicola Pinna
• Inverse Opal Photonics / Davy P Gaillot, Christopher J Summers
• Nanolaminates / Adriana V Szeghalmi, Mato Knez
• Challenges in Atomic Layer Deposition / Markku Leskel̃
• Index.