Atomic layer deposition of nanostructured materials /

• Corporate Author: Wiley InterScience (Online service)
• Other Authors: Pinna, Nicola, Knez, Mato
• Format: eBook
• Language: English
• Published: Weinheim : Wiley-VCH ; 2011.
• Subjects: Chemical vapor deposition.; Nanostructured materials.; TECHNOLOGY & ENGINEERING > Mechanical.; Electronic books.