Industrial ion sources : broadbeam gridless ion source technology /
Main Author: | |
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Format: | eBook |
Language: | English |
Published: |
Weinheim :
Wiley-VCH,
[2012]
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Subjects: | |
Online Access: | Full Text via HEAL-Link |
Physical Description: | 1 online resource (xiii, 312 pages) : illustrations |
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Bibliography: | Includes bibliographical references and index. |
ISBN: | 9783527635726 3527635726 9783527635740 3527635742 |
DOI: | 10.1002/9783527635726 |