Industrial ion sources : broadbeam gridless ion source technology /

Bibliographic Details
Main Author: Zhurin, Viacheslav V.
Format: eBook
Language:English
Published: Weinheim : Wiley-VCH, [2012]
Subjects:
Online Access:Full Text via HEAL-Link
Description
Physical Description:1 online resource (xiii, 312 pages) : illustrations
Bibliography:Includes bibliographical references and index.
ISBN:9783527635726
3527635726
9783527635740
3527635742
DOI:10.1002/9783527635726