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02683nam a2200541 4500 |
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ocn773301847 |
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OCoLC |
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20170124072429.1 |
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m o d |
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120119s2012 gw a ob 001 0 eng d |
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|a DG1
|b eng
|e pn
|c DG1
|d B24X7
|d OCLCQ
|d OCLCF
|d OCLCO
|d OCLCA
|d YDXCP
|d N$T
|d E7B
|d IDEBK
|d OCLCQ
|d DG1
|d GrThAP
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| 019 |
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|a 793494055
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|a 9783527635726
|q (electronic bk.)
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|a 3527635726
|q (electronic bk.)
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| 020 |
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|a 9783527635740
|q (electronic bk.)
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| 020 |
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|a 3527635742
|q (electronic bk.)
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| 020 |
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|z 9783527635757
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|z 3527635750
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| 020 |
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|z 9783527635733
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|z 3527635734
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| 020 |
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|z 9783527410293
|q (print)
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| 029 |
1 |
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|a DEBBG
|b BV041829401
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| 029 |
1 |
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|a NZ1
|b 15916085
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| 035 |
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|a (OCoLC)773301847
|z (OCoLC)793494055
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| 037 |
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|a 10.1002/9783527635726
|b Wiley InterScience
|n http://www3.interscience.wiley.com
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4 |
|a QC702.3
|b .Z48 2012
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| 072 |
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7 |
|a SCI
|x 013050
|2 bisacsh
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| 082 |
0 |
4 |
|a 541.372
|2 23
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| 049 |
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|a MAIN
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| 100 |
1 |
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|a Zhurin, Viacheslav V.
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| 245 |
1 |
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|a Industrial ion sources :
|b broadbeam gridless ion source technology /
|c Viacheslav V. Zhurin.
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| 264 |
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1 |
|a Weinheim :
|b Wiley-VCH,
|c [2012]
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| 264 |
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|c ©2012
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| 300 |
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|a 1 online resource (xiii, 312 pages) :
|b illustrations
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| 336 |
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|a text
|b txt
|2 rdacontent
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| 337 |
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|a computer
|b c
|2 rdamedia
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| 338 |
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|a online resource
|b cr
|2 rdacarrier
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| 505 |
0 |
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|a Front Matter -- Hall-Current Ion Sources -- Ion Source and Vacuum Chamber. Influence of Various Effects on Ion Beam Parameters -- Oscillations and Instabilities in Hall-Current Ion Sources -- Optimum Operation of Hall-Current Ion Sources -- Cathode Neutralizers for Ion Sources -- Industrial Gridless Broad-Beam Ion Source Producers, Problems and the Need for Their Standardization -- Operation of Industrial Ion Sources with Reactive Gases -- Ion Beam and Radiation Impact on Substrate Heating -- Ion Beam Energy and Current -- Plasma Optical Systems -- Ion and Plasma Sources for Science and Technology -- Ion Assist, and its Different Applications -- Magnetron with Non-Equipotential Cathode -- Index.
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| 504 |
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|a Includes bibliographical references and index.
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0 |
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|a Print version record.
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| 650 |
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|a Ion sources.
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| 650 |
|
7 |
|a SCIENCE
|x Chemistry
|x Physical & Theoretical.
|2 bisacsh
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| 650 |
|
7 |
|a Ion sources.
|2 fast
|0 (OCoLC)fst00978602
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| 655 |
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4 |
|a Electronic books.
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| 776 |
0 |
8 |
|i Print version:
|a Zhurin, Viacheslav V.
|t Industrial ion sources.
|d Weinheim : Wiley-VCH ;, ©2012
|z 9783527410293
|w (OCoLC)767863944
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| 856 |
4 |
0 |
|u https://doi.org/10.1002/9783527635726
|z Full Text via HEAL-Link
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| 994 |
|
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|a 92
|b DG1
|
