Industrial ion sources : broadbeam gridless ion source technology /

• Κύριος συγγραφέας: Zhurin, Viacheslav V.
• Μορφή: Ηλ. βιβλίο
• Γλώσσα: English
• Έκδοση: Weinheim : Wiley-VCH, [2012]
• Θέματα: Ion sources.; SCIENCE > Chemistry > Physical & Theoretical.; Electronic books.

Πίνακας περιεχομένων:

• Front Matter
• Hall-Current Ion Sources
• Ion Source and Vacuum Chamber. Influence of Various Effects on Ion Beam Parameters
• Oscillations and Instabilities in Hall-Current Ion Sources
• Optimum Operation of Hall-Current Ion Sources
• Cathode Neutralizers for Ion Sources
• Industrial Gridless Broad-Beam Ion Source Producers, Problems and the Need for Their Standardization
• Operation of Industrial Ion Sources with Reactive Gases
• Ion Beam and Radiation Impact on Substrate Heating
• Ion Beam Energy and Current
• Plasma Optical Systems
• Ion and Plasma Sources for Science and Technology
• Ion Assist, and its Different Applications
• Magnetron with Non-Equipotential Cathode
• Index.