Advanced interconnects for ULSI technology /

"This book presents an in-depth overview of present status, novel developments and new materials and approaches for advanced interconnect technology"--

Bibliographic Details
Other Authors: Baklanov, Mikhail, Ho, P. S., Zschech, Ehrenfried
Format: eBook
Language:English
Published: Hoboken, NJ : Wiley, 2012.
Subjects:
Online Access:Full Text via HEAL-Link
Description
Summary:"This book presents an in-depth overview of present status, novel developments and new materials and approaches for advanced interconnect technology"--
Physical Description:1 online resource
Bibliography:Includes bibliographical references and index.
ISBN:9781119963240
1119963249
9781119963677
1119963672
1280590807
9781280590801
DOI:10.1002/9781119963677