Advanced interconnects for ULSI technology /
"This book presents an in-depth overview of present status, novel developments and new materials and approaches for advanced interconnect technology"--
| Other Authors: | , , |
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| Format: | eBook |
| Language: | English |
| Published: |
Hoboken, NJ :
Wiley,
2012.
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| Subjects: | |
| Online Access: | Full Text via HEAL-Link |
| Summary: | "This book presents an in-depth overview of present status, novel developments and new materials and approaches for advanced interconnect technology"-- |
|---|---|
| Physical Description: | 1 online resource |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9781119963240 1119963249 9781119963677 1119963672 1280590807 9781280590801 |
| DOI: | 10.1002/9781119963677 |