Advanced interconnects for ULSI technology /
"This book presents an in-depth overview of present status, novel developments and new materials and approaches for advanced interconnect technology"--
Other Authors: | , , |
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Format: | eBook |
Language: | English |
Published: |
Hoboken, NJ :
Wiley,
2012.
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Subjects: | |
Online Access: | Full Text via HEAL-Link |