High-k gate dielectrics for CMOS technology /

• Other Authors: He, Gang (Professor of physics), Sun, Zhaoqi (Professor of physics)
• Format: eBook
• Language: English
• Published: Weinheim : Wiley-VCH, 2012.
• Subjects: Dielectrics.; Metal oxide semiconductors, Complementary.; SCIENCE > Physics > Electricity.; SCIENCE > Physics > Electromagnetism.; Electronic books.

"A state-of-the-art overview of high-k dielectric materials for advanced field-effect transistors, from both a fundamental and a technological viewpoint, summarizing the latest research results and development solutions. As such, the book clearly discusses the advantages of these materials over...