ESD basics : from semiconductor manufacturing to use /
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| Format: | eBook |
| Language: | English |
| Published: |
Oxford :
Wiley-Blackwell,
2012.
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| Online Access: | Full Text via HEAL-Link |
| Physical Description: | 1 online resource |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9781118443323 1118443322 9781118443279 1118443276 9781283599030 1283599031 |
| DOI: | 10.1002/9781118443323 |