A practical guide to optical metrology for thin films /

A one-stop, concise guide on determining and measuring thin film thickness by optical methods. This practical book covers the laws of electromagnetic radiation and interaction of light with matter, as well as the theory and practice of thickness measurement, and modern applications. In so doing, it...

Πλήρης περιγραφή

Λεπτομέρειες βιβλιογραφικής εγγραφής
Κύριος συγγραφέας: Quinten, Michael
Μορφή: Ηλ. βιβλίο
Γλώσσα:English
Έκδοση: Weinheim : Wiley-VCH ; 2012.
Θέματα:
Διαθέσιμο Online:Full Text via HEAL-Link
Περιγραφή
Περίληψη:A one-stop, concise guide on determining and measuring thin film thickness by optical methods. This practical book covers the laws of electromagnetic radiation and interaction of light with matter, as well as the theory and practice of thickness measurement, and modern applications. In so doing, it shows the capabilities and opportunities of optical thickness determination and discusses the strengths and weaknesses of measurement devices along with their evaluation methods. Following an introduction to the topic, Chapter 2 presents the basics of the propagation of light and other electromag.
Φυσική περιγραφή:1 online resource : illustrations
Βιβλιογραφία:Includes bibliographical references and index.
ISBN:9783527664344
3527664343
9783527664351
3527664351
9781299475991
129947599X
9783527664375
3527664378
DOI:10.1002/9783527664344