A practical guide to optical metrology for thin films /
A one-stop, concise guide on determining and measuring thin film thickness by optical methods. This practical book covers the laws of electromagnetic radiation and interaction of light with matter, as well as the theory and practice of thickness measurement, and modern applications. In so doing, it...
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| Format: | eBook |
| Language: | English |
| Published: |
Weinheim :
Wiley-VCH ;
2012.
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| Online Access: | Full Text via HEAL-Link |
| Summary: | A one-stop, concise guide on determining and measuring thin film thickness by optical methods. This practical book covers the laws of electromagnetic radiation and interaction of light with matter, as well as the theory and practice of thickness measurement, and modern applications. In so doing, it shows the capabilities and opportunities of optical thickness determination and discusses the strengths and weaknesses of measurement devices along with their evaluation methods. Following an introduction to the topic, Chapter 2 presents the basics of the propagation of light and other electromag. |
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| Physical Description: | 1 online resource : illustrations |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9783527664344 3527664343 9783527664351 3527664351 9781299475991 129947599X 9783527664375 3527664378 |
| DOI: | 10.1002/9783527664344 |
