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04160nam a2200697 4500 |
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ocn816311244 |
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OCoLC |
| 005 |
20170124070516.3 |
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m o d |
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cr cnu|||||||| |
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120622s2012 gw a ob 001 0 eng |
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|a AU@
|b eng
|e pn
|c AU@
|d CUS
|d OCLCQ
|d UIU
|d DG1
|d YDXCP
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|d COO
|d IDEBK
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|d OCLCQ
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| 019 |
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|a 815392087
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|z (OCoLC)840258022
|z (OCoLC)841172161
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| 037 |
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|a 478849
|b MIL
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| 050 |
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|a QC176.84.O7
|b Q56 2012
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| 072 |
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|a SCI
|2 eflch
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| 072 |
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|a SCI
|x 024000
|2 bisacsh
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|a 530.4/275
|2 23
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| 049 |
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|a MAIN
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| 100 |
1 |
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|a Quinten, Michael.
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| 245 |
1 |
2 |
|a A practical guide to optical metrology for thin films /
|c Michael Quinten.
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| 264 |
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1 |
|a Weinheim :
|b Wiley-VCH ;
|c 2012.
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| 264 |
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2 |
|a Chichester :
|b John Wiley [distributor],
|c 2012.
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| 300 |
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|a 1 online resource :
|b illustrations
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| 336 |
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|a text
|b txt
|2 rdacontent
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| 337 |
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|a computer
|b c
|2 rdamedia
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| 338 |
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|a online resource
|b cr
|2 rdacarrier
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| 504 |
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|a Includes bibliographical references and index.
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0 |
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|a Print version record.
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| 520 |
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|a A one-stop, concise guide on determining and measuring thin film thickness by optical methods. This practical book covers the laws of electromagnetic radiation and interaction of light with matter, as well as the theory and practice of thickness measurement, and modern applications. In so doing, it shows the capabilities and opportunities of optical thickness determination and discusses the strengths and weaknesses of measurement devices along with their evaluation methods. Following an introduction to the topic, Chapter 2 presents the basics of the propagation of light and other electromag.
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| 505 |
0 |
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|a Cover; Related Titles; Title Page; Copyright; Dedication; Preface; Chapter 1: Introduction; Chapter 2: Propagation of Light and Other Electromagnetic Waves; 2.1 Properties of Electromagnetic Waves; 2.2 Huygens-Fresnel Principle; 2.3 Interference of Electromagnetic Waves; 2.4 Reflection and Refraction; 2.5 Diffraction; 2.6 Scattering; 2.7 Dielectric Function and Refractive Index; Chapter 3: Spectral Reflectance and Transmittance of a Layer Stack; 3.1 Reflectance and Transmittance of a Single Layer; 3.2 Propagating Wave Model for a Layer Stack; Chapter 4: The Optical Measurement.
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8 |
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|a 7.7 Measurement of Critical DimensionsNumerics with Complex Numbers; A.1 Addition; A.2 Multiplication; A.3 Modulus; A.4 Division; A.5 Power n; A.6 Logarithm; A.7 Exponentiation; A.8 Trigonometric Functions; Fourier Transform; B.1 Linearity; B.2 Scaling; B.3 Shifting; B.4 Damping; B.5 Convolution; B.6 Plancherel Theorem and Parseval's Theorem; Levenberg-Marquardt Algorithm; Downhill Simplex Algorithm; References; Index.
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| 650 |
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0 |
|a Thin films
|x Optical properties.
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| 650 |
|
7 |
|a SCIENCE
|x Energy.
|2 bisacsh
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| 650 |
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7 |
|a SCIENCE
|x Mechanics
|x General.
|2 bisacsh
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| 650 |
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7 |
|a SCIENCE
|x Physics
|x General.
|2 bisacsh
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| 650 |
|
7 |
|a Thin films
|x Optical properties.
|2 fast
|0 (OCoLC)fst01150034
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| 655 |
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4 |
|a Electronic books.
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| 776 |
0 |
8 |
|i Print version:
|a Quinten, Michael.
|t Practical guide to optical metrology for thin films.
|d Weinheim : Wiley-VCH ; Chichester : John Wiley [distributor], 2012
|z 9783527411672
|w (OCoLC)815367813
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| 856 |
4 |
0 |
|u https://doi.org/10.1002/9783527664344
|z Full Text via HEAL-Link
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| 994 |
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|a 92
|b DG1
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