A practical guide to optical metrology for thin films /
A one-stop, concise guide on determining and measuring thin film thickness by optical methods. This practical book covers the laws of electromagnetic radiation and interaction of light with matter, as well as the theory and practice of thickness measurement, and modern applications. In so doing, it...
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| Format: | eBook |
| Language: | English |
| Published: |
Weinheim :
Wiley-VCH ;
2012.
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| Online Access: | Full Text via HEAL-Link |
