Transmission electron microscopy in micro-nanoelectronics /

Today, the availability of bright and highly coherent electron sources and sensitive detectors has radically changed the type and quality of the information which can be obtained by transmission electron microscopy (TEM). TEMs are now present in large numbers not only in academia, but also in indust...

Πλήρης περιγραφή

Λεπτομέρειες βιβλιογραφικής εγγραφής
Άλλοι συγγραφείς: Claverie, A. (Alain)
Μορφή: Ηλ. βιβλίο
Γλώσσα:English
Έκδοση: London : ISTE, Ltd. ; [2013]
Hoboken : Wiley, [2013]
Σειρά:ISTE.
Θέματα:
Διαθέσιμο Online:Full Text via HEAL-Link
Περιγραφή
Περίληψη:Today, the availability of bright and highly coherent electron sources and sensitive detectors has radically changed the type and quality of the information which can be obtained by transmission electron microscopy (TEM). TEMs are now present in large numbers not only in academia, but also in industrial research centers and fabs. This book presents in a simple and practical way the new quantitative techniques based on TEM which have recently been invented or developed to address most of the main challenging issues scientists and process engineers have to face.
Φυσική περιγραφή:1 online resource (259 pages).
Βιβλιογραφία:Includes bibliographical references and index.
ISBN:9781118579022
111857902X
9781118579039
1118579038
9781118579053
1118579054
1848213670
9781848213678
DOI:10.1002/9781118579022