System-level modeling of MEMS /

• Other Authors: Bechtold, T. (Tamara), Schrag, Gabriele, Feng, Lihong
• Format: eBook
• Language: English
• Published: Weinheim : Wiley-VCH, [2013]
• Series: Advanced micro et nanosystems ; 10.
• Subjects: Microelectromechanical systems > Simulation methods.; Electronic books.