System-level modeling of MEMS /

System-level modeling of MEMS /

Bibliographic Details
Other Authors:	Bechtold, T. (Tamara), Schrag, Gabriele, Feng, Lihong
Format:	eBook
Language:	English
Published:	Weinheim : Wiley-VCH, [2013]
Series:	Advanced micro et nanosystems ; 10.
Subjects:	Microelectromechanical systems > Simulation methods. Electronic books.
Online Access:	Full Text via HEAL-Link

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