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02410nam a2200553 4500 |
| 001 |
ocn830512261 |
| 003 |
OCoLC |
| 005 |
20170124070455.9 |
| 006 |
m o d |
| 007 |
cr |n||||||||| |
| 008 |
130222s2013 enk ob 001 0 eng d |
| 040 |
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|a CDX
|b eng
|e pn
|c CDX
|d OCLCO
|d CUS
|d DG1
|d OCLCA
|d OCLCF
|d OCLCQ
|d YDXCP
|d OCLCQ
|d GrThAP
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| 020 |
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|a 9781848214361
|q (Cloth)
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| 020 |
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|a 1848214367
|q (Cloth)
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| 020 |
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|a 9781299277304
|q (MyiLibrary)
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| 020 |
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|a 1299277306
|q (MyiLibrary)
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| 020 |
|
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|a 9781118578070
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| 020 |
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|a 1118578074
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| 020 |
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|a 9781118578070
|q (electronic bk.)
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| 029 |
1 |
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|a AU@
|b 000051629071
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| 029 |
1 |
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|a CHBIS
|b 010441778
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| 029 |
1 |
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|a CHVBK
|b 334088526
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| 029 |
1 |
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|a NZ1
|b 15340509
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| 029 |
1 |
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|a DEBBG
|b BV043395655
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| 035 |
|
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|a (OCoLC)830512261
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| 037 |
|
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|a 458980
|b MIL
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| 050 |
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4 |
|a TK7874
|b .C446 2013
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| 082 |
0 |
4 |
|a 621.381
|2 23
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| 049 |
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|a MAIN
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| 245 |
0 |
0 |
|a Chemistry in microelectronics /
|c edited by Yannick Le Tiec.
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| 264 |
|
1 |
|a London :
|b ISTE Ltd :
|c 2013.
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| 264 |
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1 |
|b John Wiley & Sons Inc,
|c 2013.
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| 300 |
|
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|a 1 online resource (384 pages).
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| 336 |
|
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|a text
|b txt
|2 rdacontent
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| 337 |
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|a computer
|b c
|2 rdamedia
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| 338 |
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|a online resource
|b cr
|2 rdacarrier
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| 490 |
1 |
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|a Electronics engineering series
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| 505 |
0 |
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|a Chemistry in the "Front end of the line" (FEOL) / François Martin, Jean-Michel Hartmann, Véronique Carron, Yannick Le Tiec -- Chemistry in interconnects / Vincent Jousseaume, Paul-Henri Haumesser, Carole Pernel, Jeffery Butterbaugh, Sylvain Maîtrejean, Didier Louis -- The chemistry of wet surface preparation / Yannick Le Tiec, Martin Knotter -- The use and management of chemical fluids in microelectronics / Christiane Gottschalk, Kevin McLaughlin, Julie Cren, Catherine Peyne, Patrick Valenti -- Surface functionalization for micro- and nanosystems / Antoine Hoang, Gilles Marchand, Guillaume Nonglaton, Isabelle Texier-Nogues, Francoise Vinet.
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| 588 |
0 |
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|a Print version record.
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| 650 |
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0 |
|a Microelectronics.
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| 650 |
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0 |
|a Chemistry.
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| 650 |
|
7 |
|a Chemistry.
|2 fast
|0 (OCoLC)fst00853344
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| 650 |
|
7 |
|a Microelectronics.
|2 fast
|0 (OCoLC)fst01019757
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| 655 |
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4 |
|a Electronic books.
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| 700 |
1 |
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|a Le Tiec, Yannick.
|
| 776 |
0 |
8 |
|i Print version:
|z 9781299277304
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| 830 |
|
0 |
|a Electronics engineering series.
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| 856 |
4 |
0 |
|u https://doi.org/10.1002/9781118578070
|z Full Text via HEAL-Link
|
| 994 |
|
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|a 92
|b DG1
|
