Chemistry in microelectronics /
Άλλοι συγγραφείς: | |
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Μορφή: | Ηλ. βιβλίο |
Γλώσσα: | English |
Έκδοση: |
London :
ISTE Ltd :
2013.
John Wiley & Sons Inc, 2013. |
Σειρά: | Electronics engineering series.
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Θέματα: | |
Διαθέσιμο Online: | Full Text via HEAL-Link |
Πίνακας περιεχομένων:
- Chemistry in the "Front end of the line" (FEOL) / François Martin, Jean-Michel Hartmann, Véronique Carron, Yannick Le Tiec
- Chemistry in interconnects / Vincent Jousseaume, Paul-Henri Haumesser, Carole Pernel, Jeffery Butterbaugh, Sylvain Maîtrejean, Didier Louis
- The chemistry of wet surface preparation / Yannick Le Tiec, Martin Knotter
- The use and management of chemical fluids in microelectronics / Christiane Gottschalk, Kevin McLaughlin, Julie Cren, Catherine Peyne, Patrick Valenti
- Surface functionalization for micro- and nanosystems / Antoine Hoang, Gilles Marchand, Guillaume Nonglaton, Isabelle Texier-Nogues, Francoise Vinet.