Chemistry in microelectronics /

• Other Authors: Le Tiec, Yannick
• Format: eBook
• Language: English
• Published: London : ISTE Ltd : 2013.; John Wiley & Sons Inc, 2013.
• Series: Electronics engineering series.
• Subjects: Microelectronics.; Chemistry.; Electronic books.

Table of Contents:

• Chemistry in the "Front end of the line" (FEOL) / François Martin, Jean-Michel Hartmann, Véronique Carron, Yannick Le Tiec
• Chemistry in interconnects / Vincent Jousseaume, Paul-Henri Haumesser, Carole Pernel, Jeffery Butterbaugh, Sylvain Maîtrejean, Didier Louis
• The chemistry of wet surface preparation / Yannick Le Tiec, Martin Knotter
• The use and management of chemical fluids in microelectronics / Christiane Gottschalk, Kevin McLaughlin, Julie Cren, Catherine Peyne, Patrick Valenti
• Surface functionalization for micro- and nanosystems / Antoine Hoang, Gilles Marchand, Guillaume Nonglaton, Isabelle Texier-Nogues, Francoise Vinet.