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04344nam a2200793 4500 |
| 001 |
ocn843026111 |
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OCoLC |
| 005 |
20170124071859.8 |
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m o d |
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130510s2013 enk ob 001 0 eng |
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|a 2013019306
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|a DLC
|b eng
|e rda
|e pn
|c DLC
|d YDX
|d N$T
|d IDEBK
|d DG1
|d CUS
|d YDXCP
|d CDX
|d COO
|d E7B
|d OCLCQ
|d DEBBG
|d EBLCP
|d GrThAP
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| 019 |
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|a 961667735
|a 962575981
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|a 9781118535066
|q (ePub)
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|a 111853509X
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|a 9781118535059
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|a (OCoLC)843026111
|z (OCoLC)961667735
|z (OCoLC)962575981
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| 042 |
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|a pcc
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| 050 |
0 |
0 |
|a TK7874.843
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| 072 |
|
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|x 008060
|2 bisacsh
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| 082 |
0 |
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|a 621.381
|2 23
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| 049 |
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|a MAIN
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0 |
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|a Nanoimprint technology :
|b nanotransfer for thermoplastic and photocurable polymer /
|c edited by Jun Taniguchi, Hiroshi Ito, Jun Mizuno, Takushi Saito.
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| 264 |
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1 |
|a Chichester, West Sussex, United Kingdom :
|b Wiley,
|c 2013.
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| 300 |
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|a 1 online resource.
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| 336 |
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|a text
|b txt
|2 rdacontent
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| 337 |
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|a computer
|b c
|2 rdamedia
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| 338 |
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|a online resource
|b cr
|2 rdacarrier
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| 490 |
1 |
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|a Microsystem and nanotechnology series
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|a Includes bibliographical references and index.
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0 |
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|a Print version record and CIP data provided by publisher.
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0 |
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|a Series Page; Title Page; Copyright; About the Editors; List of Contributors; Series Preface; Preface; Chapter 1: What is a Nanoimprint?; References; Chapter 2: Nanoimprint Lithography: Background and Related Techniques; 2.1 History of Material Processing: Polymer Processing; 2.2 Products with Microstructure and Nanostructure; 2.3 Technology for Making Micro- and Nanostructures; References; Chapter 3: Nanopattern Transfer Technology of Thermoplastic Materials; 3.1 Behavior of Thermoplastic Materials; 3.2 Applicable Processes Used for Nanopattern Transfer
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| 505 |
8 |
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|a 3.3 Pattern Transfer Mechanism of Thermal Cycle NIL3.4 Modeling of Nanopattern Transfer; References; Chapter 4: Mold Fabrication Process; 4.1 Ultra Precision Cutting Techniques Applied to Metal Molds Fabrication for Nanoimprint Lithography; 4.2 Nanoimprint Mold Fabrication Using Photomask Technology; References; Chapter 5: Ultraviolet Nanoimprint Lithography; 5.1 Orientation and Background of UV-NIL; 5.2 Transfer Mechanism of UV-NIL; 5.3 UV-NIL Materials and Equipment; 5.4 Evaluation Method; References; Chapter 6: Applications and Leading-Edge Technology
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8 |
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|a 6.1 Advanced Nanoimprinting Technologies6.2 Applications; 6.3 High-Accuracy Nanoimprint Technology, Development of Micropatterning Method, and Automatic Process Control Using Batch Press Type, Step and Repeat Type Nanoimprint Machine; 6.4 Micro/Nano Melt Transcription Molding Process; 6.5 Future Trends; References; Index
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| 650 |
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|a Nanoimprint lithography.
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| 650 |
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|a Nanolithography
|x Materials.
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| 650 |
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|a Plastics
|x Molding.
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| 650 |
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|a Polymers
|x Thermal properties.
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| 650 |
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0 |
|a Thermoplastics.
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| 650 |
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|a Microfluidics.
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| 650 |
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|a Transfer-printing.
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| 650 |
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7 |
|a TECHNOLOGY & ENGINEERING
|x Electronics
|x Digital.
|2 bisacsh
|
| 650 |
|
7 |
|a TECHNOLOGY & ENGINEERING
|x Electronics
|x Microelectronics.
|2 bisacsh
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| 655 |
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4 |
|a Electronic books.
|
| 655 |
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7 |
|a Electronic books.
|2 local
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| 700 |
1 |
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|a Taniguchi, Jun.
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| 776 |
0 |
8 |
|i Print version:
|t Nanoimprint technology.
|d Chichester, West Sussex, United Kingdom : John Wiley & Sons Inc., 2013
|z 9781118359839
|w (DLC) 2013007112
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| 830 |
|
0 |
|a Wiley microsystem and nanotechnology series.
|
| 856 |
4 |
0 |
|u https://doi.org/10.1002/9781118535059
|z Full Text via HEAL-Link
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| 994 |
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|a 92
|b DG1
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