Nanoimprint technology : nanotransfer for thermoplastic and photocurable polymer /
| Άλλοι συγγραφείς: | |
|---|---|
| Μορφή: | Ηλ. βιβλίο |
| Γλώσσα: | English |
| Έκδοση: |
Chichester, West Sussex, United Kingdom :
Wiley,
2013.
|
| Σειρά: | Wiley microsystem and nanotechnology series.
|
| Θέματα: | |
| Διαθέσιμο Online: | Full Text via HEAL-Link |
Πίνακας περιεχομένων:
- Series Page; Title Page; Copyright; About the Editors; List of Contributors; Series Preface; Preface; Chapter 1: What is a Nanoimprint?; References; Chapter 2: Nanoimprint Lithography: Background and Related Techniques; 2.1 History of Material Processing: Polymer Processing; 2.2 Products with Microstructure and Nanostructure; 2.3 Technology for Making Micro- and Nanostructures; References; Chapter 3: Nanopattern Transfer Technology of Thermoplastic Materials; 3.1 Behavior of Thermoplastic Materials; 3.2 Applicable Processes Used for Nanopattern Transfer
- 3.3 Pattern Transfer Mechanism of Thermal Cycle NIL3.4 Modeling of Nanopattern Transfer; References; Chapter 4: Mold Fabrication Process; 4.1 Ultra Precision Cutting Techniques Applied to Metal Molds Fabrication for Nanoimprint Lithography; 4.2 Nanoimprint Mold Fabrication Using Photomask Technology; References; Chapter 5: Ultraviolet Nanoimprint Lithography; 5.1 Orientation and Background of UV-NIL; 5.2 Transfer Mechanism of UV-NIL; 5.3 UV-NIL Materials and Equipment; 5.4 Evaluation Method; References; Chapter 6: Applications and Leading-Edge Technology
- 6.1 Advanced Nanoimprinting Technologies6.2 Applications; 6.3 High-Accuracy Nanoimprint Technology, Development of Micropatterning Method, and Automatic Process Control Using Batch Press Type, Step and Repeat Type Nanoimprint Machine; 6.4 Micro/Nano Melt Transcription Molding Process; 6.5 Future Trends; References; Index
