Trace analysis of specialty and electronic gases /
Explores the latest advances and applications of specialty and electronic gas analysis The semiconductor industry depends upon a broad range of instrumental techniques in order to detect and analyze impurities that may be present in specialty and electronic gases, including permanent gases, water va...
| Κύριος συγγραφέας: | |
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| Άλλοι συγγραφείς: | |
| Μορφή: | Ηλ. βιβλίο |
| Γλώσσα: | English |
| Έκδοση: |
Hoboken :
Wiley,
[2013]
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| Θέματα: | |
| Διαθέσιμο Online: | Full Text via HEAL-Link |
| Περίληψη: | Explores the latest advances and applications of specialty and electronic gas analysis The semiconductor industry depends upon a broad range of instrumental techniques in order to detect and analyze impurities that may be present in specialty and electronic gases, including permanent gases, water vapor, reaction by-products, and metal species. Trace Analysis of Specialty and Electronic Gases draws together all the latest advances in analytical chemistry, providing researchers with both the theory and the operating principles of the full spectrum of instrumental technique. |
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| Περιγραφή τεκμηρίου: | Appendix A: Cylinder and Specialized Fittings. |
| Φυσική περιγραφή: | 1 online resource (xxxv, 349 pages) : illustrations |
| Βιβλιογραφία: | Includes bibliographical references and index. |
| ISBN: | 9781118642771 1118642775 9781118642566 1118642562 9781299804647 1299804640 |
| DOI: | 10.1002/9781118642771 |
