Trace analysis of specialty and electronic gases /

Trace analysis of specialty and electronic gases /

Explores the latest advances and applications of specialty and electronic gas analysis The semiconductor industry depends upon a broad range of instrumental techniques in order to detect and analyze impurities that may be present in specialty and electronic gases, including permanent gases, water va...

Πλήρης περιγραφή

Λεπτομέρειες βιβλιογραφικής εγγραφής
Κύριος συγγραφέας: Geiger, William M., 1948-
Άλλοι συγγραφείς: Raynor, Mark W., 1961-
Μορφή: Ηλ. βιβλίο
Γλώσσα:English
Έκδοση: Hoboken : Wiley, [2013]
Θέματα:
Gases > Analysis.
Trace elements > Analysis.
Gases > Spectra.
SCIENCE > Chemistry > Analytic.
Electronic books.
Διαθέσιμο Online:Full Text via HEAL-Link
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049 |a MAIN 
100 1 |a Geiger, William M.,  |d 1948- 
245 1 0 |a Trace analysis of specialty and electronic gases /  |c edited by William M. Geiger, Mark W. Raynor. 
264 1 |a Hoboken :  |b Wiley,  |c [2013] 
264 4 |c ©2013 
300 |a 1 online resource (xxxv, 349 pages) :  |b illustrations 
336 |a text  |b txt  |2 rdacontent 
337 |a computer  |b c  |2 rdamedia 
338 |a online resource  |b cr  |2 rdacarrier 
505 0 |a Cover; Half Title page; Title page; Copyright page; Contributors; List of Figures; List of Tables; Foreword; Acknowledgments; Acronyms; Chapter 1: Introduction to Gas Analysis: Past and Future; 1.1 The Beginning; 1.2 Gas Chromatography; 1.3 Ion Chromatography; 1.4 Mass Spectrometry; 1.5 Ion Mobility Spectrometry; 1.6 Optical Spectroscopy; 1.7 Metals Analysis; 1.8 Species-Specific Analyzers; 1.9 Sensors; 1.10 The Future; References; Chapter 2: Sample Preparation and ICP-MS Analysis of Gases for Metals; 2.1 Introduction; 2.2 Extraction of Impurities Before Analysis; 2.3 Direct Analysis of ESGs. 
505 8 |a 2.4 ConclusionsReferences; Chapter 3: Novel Improvements in FTIR Analysis of Specialty Gases; 3.1 Gas-Phase Analysis Using FTIR Spectroscopy; 3.2 Gas-Phase Effects on Spectral Line Shape; 3.3 Factors That Greatly Affect Quantification; 3.4 Future Applications; References; Chapter 4: Emerging Infrared Laser Absorption Spectroscopic Techniques for Gas Analysis; 4.1 Introduction; 4.2 Laser Absorption Spectroscopic Techniques; 4.3 Applications of Semiconductor LAS-Based Trace Gas Sensor Systems; 4.4 Conclusions and Future Trends; References. 
505 8 |a Chapter 5: Atmospheric Pressure Ionization Mass Spectrometry for Bulk and Electronic Gas Analysis5.1 Introduction; 5.2 APIMS Operating Principle; 5.3 Point-to-Plane Corona Discharge Ionization; 5.4 Factors Affecting Sensitivity in Point-to-Plane Corona Discharge APIMS; 5.5 Applications of Point-to-Plane Corona Discharge APIMS in Bulk and Electronic Gases; 5.6 Nickel-63 Beta Emitter APIMS; 5.7 Specialty Gas Analysis Application: Determination of Oxygenated Impurities in High-Purity Ammonia; 5.8 Conclusions; References. 
505 8 |a Chapter 6: GC/MS, GC/AED, and GC-ICP-MS Analysis of Electronic Specialty Gases6.1 Introduction; 6.2 GC/MS; 6.3 GC/AED; 6.4 GC-ICP-MS; 6.5 Conclusions; References; Chapter 7: Trace Water Vapor Analysis in Specialty Gases: Sensor and Spectroscopic Approaches; 7.1 Introduction; 7.2 Primary Standards for Water Vapor Measurement; 7.3 Sensor Technologies; 7.4 Spectroscopic Methods; 7.5 Conclusions; References; Chapter 8: Gas Chromatographic Column Considerations; 8.1 Introduction; 8.2 Column Considerations with Packed Columns; 8.3 Primary Selection Criteria for Capillary Columns; 8.4 Applications. 
505 8 |a 8.5 The Future8.6 Conclusions; References; Chapter 9: Gas Mixtures and Standards; 9.1 Introduction; 9.2 Definition of Gas Standards; 9.3 Cylinders and Valves: Sizes, Types, and Material Compositions; 9.4 Preparation Techniques for Gas Standards; 9.5 Pressure Restrictions and Compressibility Considerations; 9.6 Multicomponent Standards: General Considerations; 9.7 Cylinder Standard Stability Consideration; 9.8 Liquefied Compressed Gas Standards: Preparation Differences and Uses; 9.9 Cylinder Standard Alternatives; 9.10 Dilution Devices and Calibration Uses; References. 
500 |a Appendix A: Cylinder and Specialized Fittings. 
520 |a Explores the latest advances and applications of specialty and electronic gas analysis The semiconductor industry depends upon a broad range of instrumental techniques in order to detect and analyze impurities that may be present in specialty and electronic gases, including permanent gases, water vapor, reaction by-products, and metal species. Trace Analysis of Specialty and Electronic Gases draws together all the latest advances in analytical chemistry, providing researchers with both the theory and the operating principles of the full spectrum of instrumental technique. 
588 0 |a Print version record. 
504 |a Includes bibliographical references and index. 
650 0 |a Gases  |x Analysis. 
650 0 |a Trace elements  |x Analysis. 
650 0 |a Gases  |x Spectra. 
650 7 |a SCIENCE  |x Chemistry  |x Analytic.  |2 bisacsh 
650 7 |a Gases  |x Analysis.  |2 fast  |0 (OCoLC)fst00938604 
650 7 |a Gases  |x Spectra.  |2 fast  |0 (OCoLC)fst00938636 
650 7 |a Trace elements  |x Analysis.  |2 fast  |0 (OCoLC)fst01153532 
655 4 |a Electronic books. 
700 1 |a Raynor, Mark W.,  |d 1961- 
776 0 8 |i Print version:  |a Geiger, William M.  |t Trace Analysis of Specialty and Electronic Gases.  |d Hoboken : Wiley, ©2013  |z 9781118065662 
856 4 0 |u https://doi.org/10.1002/9781118642771  |z Full Text via HEAL-Link 
994 |a 92  |b DG1 

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