Trace analysis of specialty and electronic gases /

• Κύριος συγγραφέας: Geiger, William M., 1948-
• Άλλοι συγγραφείς: Raynor, Mark W., 1961-
• Μορφή: Ηλ. βιβλίο
• Γλώσσα: English
• Έκδοση: Hoboken : Wiley, [2013]
• Θέματα: Gases > Analysis.; Trace elements > Analysis.; Gases > Spectra.; SCIENCE > Chemistry > Analytic.; Electronic books.

Explores the latest advances and applications of specialty and electronic gas analysis The semiconductor industry depends upon a broad range of instrumental techniques in order to detect and analyze impurities that may be present in specialty and electronic gases, including permanent gases, water va...

Πίνακας περιεχομένων:

• Cover; Half Title page; Title page; Copyright page; Contributors; List of Figures; List of Tables; Foreword; Acknowledgments; Acronyms; Chapter 1: Introduction to Gas Analysis: Past and Future; 1.1 The Beginning; 1.2 Gas Chromatography; 1.3 Ion Chromatography; 1.4 Mass Spectrometry; 1.5 Ion Mobility Spectrometry; 1.6 Optical Spectroscopy; 1.7 Metals Analysis; 1.8 Species-Specific Analyzers; 1.9 Sensors; 1.10 The Future; References; Chapter 2: Sample Preparation and ICP-MS Analysis of Gases for Metals; 2.1 Introduction; 2.2 Extraction of Impurities Before Analysis; 2.3 Direct Analysis of ESGs.
• 2.4 ConclusionsReferences; Chapter 3: Novel Improvements in FTIR Analysis of Specialty Gases; 3.1 Gas-Phase Analysis Using FTIR Spectroscopy; 3.2 Gas-Phase Effects on Spectral Line Shape; 3.3 Factors That Greatly Affect Quantification; 3.4 Future Applications; References; Chapter 4: Emerging Infrared Laser Absorption Spectroscopic Techniques for Gas Analysis; 4.1 Introduction; 4.2 Laser Absorption Spectroscopic Techniques; 4.3 Applications of Semiconductor LAS-Based Trace Gas Sensor Systems; 4.4 Conclusions and Future Trends; References.
• Chapter 5: Atmospheric Pressure Ionization Mass Spectrometry for Bulk and Electronic Gas Analysis5.1 Introduction; 5.2 APIMS Operating Principle; 5.3 Point-to-Plane Corona Discharge Ionization; 5.4 Factors Affecting Sensitivity in Point-to-Plane Corona Discharge APIMS; 5.5 Applications of Point-to-Plane Corona Discharge APIMS in Bulk and Electronic Gases; 5.6 Nickel-63 Beta Emitter APIMS; 5.7 Specialty Gas Analysis Application: Determination of Oxygenated Impurities in High-Purity Ammonia; 5.8 Conclusions; References.
• Chapter 6: GC/MS, GC/AED, and GC-ICP-MS Analysis of Electronic Specialty Gases6.1 Introduction; 6.2 GC/MS; 6.3 GC/AED; 6.4 GC-ICP-MS; 6.5 Conclusions; References; Chapter 7: Trace Water Vapor Analysis in Specialty Gases: Sensor and Spectroscopic Approaches; 7.1 Introduction; 7.2 Primary Standards for Water Vapor Measurement; 7.3 Sensor Technologies; 7.4 Spectroscopic Methods; 7.5 Conclusions; References; Chapter 8: Gas Chromatographic Column Considerations; 8.1 Introduction; 8.2 Column Considerations with Packed Columns; 8.3 Primary Selection Criteria for Capillary Columns; 8.4 Applications.
• 8.5 The Future8.6 Conclusions; References; Chapter 9: Gas Mixtures and Standards; 9.1 Introduction; 9.2 Definition of Gas Standards; 9.3 Cylinders and Valves: Sizes, Types, and Material Compositions; 9.4 Preparation Techniques for Gas Standards; 9.5 Pressure Restrictions and Compressibility Considerations; 9.6 Multicomponent Standards: General Considerations; 9.7 Cylinder Standard Stability Consideration; 9.8 Liquefied Compressed Gas Standards: Preparation Differences and Uses; 9.9 Cylinder Standard Alternatives; 9.10 Dilution Devices and Calibration Uses; References.