Trace analysis of specialty and electronic gases /

• Main Author: Geiger, William M., 1948-
• Other Authors: Raynor, Mark W., 1961-
• Format: eBook
• Language: English
• Published: Hoboken : Wiley, [2013]
• Subjects: Gases > Analysis.; Trace elements > Analysis.; Gases > Spectra.; SCIENCE > Chemistry > Analytic.; Electronic books.

Explores the latest advances and applications of specialty and electronic gas analysis The semiconductor industry depends upon a broad range of instrumental techniques in order to detect and analyze impurities that may be present in specialty and electronic gases, including permanent gases, water va...